Spectroscopic Ellipsometric Single Point Film Thickness Measurement |
|
Materials |
aluminum nitride, PZT, silicon dioxide on silicon, silicon nitride on silicon |
Refractive index |
1 .. 4 |
Thickness |
0.01 .. 2 µm |
Wafer size |
|
Equipment |
Woollam Spectroscopic Ellipsometer |
Equipment characteristics: |
Batch sizes |
50 .. 150 mm: 1 |
Piece dimension Range of wafer piece dimensions the equipment can accept |
50 .. 150 mm |
Piece geometry Geometry of wafer pieces the equipment can accept |
circular, irregular, other, rectangular |
Piece thickness Range of wafer piece thickness the equipment can accept |
200 .. 700 µm |
Wafer materials List of wafer materials this tool can accept (not list of all materials, just the wafer itself). |
silicon, silicon on insulator |