ok
Dimensions
143000000 by 138990000 micron
Layers
 
Structures
refers to ('S2037LH', (1, 21)), ('S2037LV', (21, 1)), ('S2037LV2', (19, 1)), ('S2037LH2', (1, 19))
refers to Y_435_0210_2, Y_435_0210_2, Y_428_2037_2, Y_428_2037_2, Y_428_2037_2, Y_428_2037_2, PELLICLE, PELLICLE, PELLICLE, PELLICLE, PELLICLE, PELLICLE, PELLICLE, PELLICLE
refers to ('L_V_40_360_CHOP_5', (21, 1)), ('L_V_44_360_CHOP_5', (19, 1))
refers to Y_450_2404_1