Blue M Bake Oven

Alternate Name Blue M oven
Manufacturer Blue M unit of General Signal Co.
Type commercial
Equipment Characteristics
Batch sizes 100 mm: 4, 150 mm: 3, 50 mm: 4, 75 mm: 4
Wafer diameter(s)
List or range of wafer diameters the tool can accept
50 .. 100 mm
Wafer geometry
Types of wafers this equipment can accept
1-flat, 2-flat, no-flat, notched
Wafer holder
Device that holds the wafers during processing.
stainless steel
Wafer materials
List of wafer materials this tool can accept (not list of all materials, just the wafer itself).
silicon, silicon on insulator
Wafer thickness
List or range of wafer thicknesses the tool can accept
200 .. 800 µm