Blue M Bake Oven
|Alternate Name||Blue M oven|
|Manufacturer||Blue M unit of General Signal Co.|
|Batch sizes||100 mm: 4, 150 mm: 3, 50 mm: 4, 75 mm: 4|
List or range of wafer diameters the tool can accept
|50 .. 100 mm|
Types of wafers this equipment can accept
|1-flat, 2-flat, no-flat, notched|
Device that holds the wafers during processing.
List of wafer materials this tool can accept (not list of all materials, just the wafer itself).
|silicon, silicon on insulator|
List or range of wafer thicknesses the tool can accept
|200 .. 800 µm|