BTI Horizontal Tube Furnace |
|
|---|---|
| Alternate Name | Low Temp. Anneal Tube |
| Manufacturer | BTI |
| Model | Horizontal Tube |
| Type | commercial |
| Equipment Characteristics | |
| Batch sizes | 100 mm: 100, 75 mm: 25 |
| MOS clean | no |
| Wafer diameter(s) List or range of wafer diameters the tool can accept |
100 mm, 75 mm |
| Wafer geometry Types of wafers this equipment can accept |
1-flat, 2-flat, notched, no-flat |
| Wafer holder Device that holds the wafers during processing. |
quartz boat |
| Wafer materials List of wafer materials this tool can accept (not list of all materials, just the wafer itself). |
silicon on insulator, silicon |
| Wafer thickness List or range of wafer thicknesses the tool can accept |
300 .. 600 µm |