BTI Horizontal Tube Furnace
|Alternate Name||Low Temp. Anneal Tube|
|Batch sizes||100 mm: 100, 75 mm: 25|
List or range of wafer diameters the tool can accept
|100 mm, 75 mm|
Types of wafers this equipment can accept
|1-flat, 2-flat, notched, no-flat|
Device that holds the wafers during processing.
List of wafer materials this tool can accept (not list of all materials, just the wafer itself).
|silicon on insulator, silicon|
List or range of wafer thicknesses the tool can accept
|300 .. 600 µm|