Tylan Furnace (Oxidation, Tubes #1 .. #4)
List or range of wafer diameters the tool can accept
|75 mm, 100 mm|
Types of wafers this equipment can accept
|no-flat, 1-flat, 2-flat|
Device that holds the wafers during processing.
List of wafer materials this tool can accept (not list of all materials, just the wafer itself).
|silicon, silicon on insulator, silicon on sapphire|
List or range of wafer thicknesses the tool can accept
|300 .. 600 µm|