MRL Furnace 322-4 |
|
|---|---|
| Model | |
| Type | |
| Equipment Characteristics | |
| MOS clean | no |
| Wafer diameter(s) List or range of wafer diameters the tool can accept |
100 mm, 150 mm |
| Wafer holder Device that holds the wafers during processing. |
quartz |
| Wafer materials List of wafer materials this tool can accept (not list of all materials, just the wafer itself). |
Borofloat (Schott), quartz (single crystal), silicon |
| Wafer thickness List or range of wafer thicknesses the tool can accept |
200 .. 1000 µm |