MRL Furnace 322-4
List or range of wafer diameters the tool can accept
|100 mm, 150 mm|
Device that holds the wafers during processing.
List of wafer materials this tool can accept (not list of all materials, just the wafer itself).
|Borofloat (Schott), quartz (single crystal), silicon|
List or range of wafer thicknesses the tool can accept
|200 .. 1000 µm|