Headway Manual Spinner

Alternate Name photoresist spinner
Manufacturer Headway Research
Type commercial
Equipment Characteristics
Batch sizes 100 mm: 1, 150 mm: 1, 200 mm: 1, 50 mm: 1, 75 mm: 1
Piece dimension
Range of wafer piece dimensions the equipment can accept
0 .. 75 mm
Piece geometry
Geometry of wafer pieces the equipment can accept
other, rectangular, irregular, circular
Piece thickness
Range of wafer piece thickness the equipment can accept
200 .. 2500 µm
Wafer diameter(s)
List or range of wafer diameters the tool can accept
75 .. 150 mm
Wafer holder
Device that holds the wafers during processing.
aluminum chuck
Wafer materials
List of wafer materials this tool can accept (not list of all materials, just the wafer itself).
gallium arsenide, other, quartz (single crystal), silicon, silicon carbide, indium phosphide, sapphire, silicon on insulator, Pyrex (Corning 7740), quartz (fused silica)