Zygo GPI Interferometer |
|
|---|---|
| Model | GPI 4" XP |
| Type | commercial |
| Comments | |
|
|
| Equipment Characteristics | |
| Batch sizes | 0 .. 100 mm: 1 |
| Wafer diameter(s) List or range of wafer diameters the tool can accept |
0 .. 100 mm |
| Wafer geometry Types of wafers this equipment can accept |
1-flat, 2-flat, no-flat |
| Wafer materials List of wafer materials this tool can accept (not list of all materials, just the wafer itself). |
glass (category), silicon, silicon on insulator |
| Wafer thickness List or range of wafer thicknesses the tool can accept |
300 .. 3000 µm |