SemiGroup 1000

Equipment Characteristics
Wafer diameter(s)
List or range of wafer diameters the tool can accept
25 mm, 50 mm, 75 mm, 100 mm
Wafer materials
List of wafer materials this tool can accept (not list of all materials, just the wafer itself).
silicon, silicon dioxide
Wafer thickness
List or range of wafer thicknesses the tool can accept
50 .. 2000 µm