Microvoid Fume Hood |
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|---|---|
| Model | |
| Type | |
| Equipment Characteristics | |
| Wafer diameter(s) List or range of wafer diameters the tool can accept |
100 mm, 150 mm |
| Wafer holder Device that holds the wafers during processing. |
teflon |
| Wafer materials List of wafer materials this tool can accept (not list of all materials, just the wafer itself). |
silicon, silicon dioxide, alumina, Borofloat (Schott) |
| Wafer thickness List or range of wafer thicknesses the tool can accept |
300 .. 1000 µm |