Microvoid Fume Hood
List or range of wafer diameters the tool can accept
|100 mm, 150 mm|
Device that holds the wafers during processing.
List of wafer materials this tool can accept (not list of all materials, just the wafer itself).
|silicon, silicon dioxide, alumina, Borofloat (Schott)|
List or range of wafer thicknesses the tool can accept
|300 .. 1000 µm|