Tystar furnace 20 (Ge / SiGe tube)
|Batch sizes||100 mm: 24, 150 mm: 12|
List or range of wafer diameters the tool can accept
|100 mm, 150 mm|
Types of wafers this equipment can accept
|1-flat, 2-flat, no-flat|
Device that holds the wafers during processing.
|fused silica boat|
List of wafer materials this tool can accept (not list of all materials, just the wafer itself).
List or range of wafer thicknesses the tool can accept
|300 .. 600 µm|