Hitachi SEM |
|
|---|---|
| Alternate Name | SEM |
| Manufacturer | Hitachi |
| Model | S-4500T |
| Type | commercial |
| Equipment Characteristics | |
| Batch sizes | 3 .. 100 mm: 1 |
| Piece dimension Range of wafer piece dimensions the equipment can accept |
3 .. 100 mm |
| Piece geometry Geometry of wafer pieces the equipment can accept |
circular, irregular, other, rectangular |
| Piece thickness Range of wafer piece thickness the equipment can accept |
200 .. 700 µm |
| Wafer geometry Types of wafers this equipment can accept |
1-flat, 2-flat, no-flat, notched |
| Wafer materials List of wafer materials this tool can accept (not list of all materials, just the wafer itself). |
alumina, gallium arsenide, silicon, silicon carbide, titanium |
| Wafer thickness List or range of wafer thicknesses the tool can accept |
200 .. 700 µm |