List or range of wafer diameters the tool can accept
|50 mm, 75 mm, 100 mm|
Device that holds the wafers during processing.
List of wafer materials this tool can accept (not list of all materials, just the wafer itself).
|gallium arsenide, glass (category), indium phosphide, silicon|
List or range of wafer thicknesses the tool can accept
|100 .. 1000 µm|