SJ-20 evaporator |
|
|---|---|
| Model | SJ-20 |
| Type | commercial |
| Equipment Characteristics | |
| Batch sizes | 100 mm: 8, 50 mm: 8, 75 mm: 8 |
| Wafer diameter(s) List or range of wafer diameters the tool can accept |
50 mm, 75 mm, 100 mm |
| Wafer geometry Types of wafers this equipment can accept |
1-flat, 2-flat, no-flat, notched |
| Wafer holder Device that holds the wafers during processing. |
rotating orbital |
| Wafer materials List of wafer materials this tool can accept (not list of all materials, just the wafer itself). |
gallium arsenide, glass (category), indium phosphide, Pyrex (Corning 7740), quartz (fused silica), silicon |
| Wafer thickness List or range of wafer thicknesses the tool can accept |
200 .. 1000 µm |