|Batch sizes||100 mm: 8, 50 mm: 8, 75 mm: 8|
List or range of wafer diameters the tool can accept
|50 mm, 75 mm, 100 mm|
Types of wafers this equipment can accept
|1-flat, 2-flat, no-flat, notched|
Device that holds the wafers during processing.
List of wafer materials this tool can accept (not list of all materials, just the wafer itself).
|gallium arsenide, glass (category), indium phosphide, Pyrex (Corning 7740), quartz (fused silica), silicon|
List or range of wafer thicknesses the tool can accept
|200 .. 1000 µm|