CHA e-Beam Vacuum Evaporator System
|Alternate Name||e-Beam Evaporator|
|Batch sizes||100 mm: 8, 150 mm: 5, 75 mm: 8|
List or range of wafer diameters the tool can accept
|75 .. 150 mm|
Types of wafers this equipment can accept
|1-flat, 2-flat, notched, no-flat|
Device that holds the wafers during processing.
List of wafer materials this tool can accept (not list of all materials, just the wafer itself).
|quartz (fused silica), sapphire, gallium arsenide, silicon, silicon on insulator|
List or range of wafer thicknesses the tool can accept
|200 .. 800 µm|