CHA e-Beam Vacuum Evaporator System

Alternate Name e-Beam Evaporator
Manufacturer CHA Industries
Model SEC 600
Type commercial
Equipment Characteristics
Batch sizes 100 mm: 8, 150 mm: 5, 75 mm: 8
Wafer diameter(s)
List or range of wafer diameters the tool can accept
75 .. 150 mm
Wafer geometry
Types of wafers this equipment can accept
1-flat, 2-flat, notched, no-flat
Wafer holder
Device that holds the wafers during processing.
mechanical clamp
Wafer materials
List of wafer materials this tool can accept (not list of all materials, just the wafer itself).
quartz (fused silica), sapphire, gallium arsenide, silicon, silicon on insulator
Wafer thickness
List or range of wafer thicknesses the tool can accept
200 .. 800 µm
[Thumbnail]CHA-ebeam.jpg (69.5 KB, image/jpeg)
attached by ozgur (Mehmet Ozgur) on 2004-01-21 10:35