FPP-5000 |
|
|---|---|
| Alternate Name | 4 pt probe |
| Manufacturer | Miller Design & Equipment, Inc. |
| Model | 5000 |
| Type | commercial |
| Equipment Characteristics | |
| Batch sizes | 100 mm: 1, 75 mm: 1 |
| MOS clean | no |
| Wafer diameter(s) List or range of wafer diameters the tool can accept |
75 .. 100 mm |
| Wafer holder Device that holds the wafers during processing. |
plastic chuck |
| Wafer materials List of wafer materials this tool can accept (not list of all materials, just the wafer itself). |
gallium arsenide, indium phosphide, silicon |
| Wafer thickness List or range of wafer thicknesses the tool can accept |
200 .. 550 µm |