Alternate Name 4 pt probe
Manufacturer Miller Design & Equipment, Inc.
Model 5000
Type commercial
Equipment Characteristics
Batch sizes 100 mm: 1, 75 mm: 1
MOS clean no
Wafer diameter(s)
List or range of wafer diameters the tool can accept
75 .. 100 mm
Wafer holder
Device that holds the wafers during processing.
plastic chuck
Wafer materials
List of wafer materials this tool can accept (not list of all materials, just the wafer itself).
gallium arsenide, indium phosphide, silicon
Wafer thickness
List or range of wafer thicknesses the tool can accept
200 .. 550 µm