Innovac sputter system |
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|---|---|
| Model | |
| Type | commercial |
| Comments | |
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| Equipment Characteristics | |
| Batch sizes | 100 mm: 1 |
| Piece dimension Range of wafer piece dimensions the equipment can accept |
1 .. 10 cm |
| Piece geometry Geometry of wafer pieces the equipment can accept |
rectangular, irregular, circular |
| Piece thickness Range of wafer piece thickness the equipment can accept |
100 .. 1000 µm |
| Wafer diameter(s) List or range of wafer diameters the tool can accept |
100 mm |
| Wafer geometry Types of wafers this equipment can accept |
1-flat, no-flat |
| Wafer materials List of wafer materials this tool can accept (not list of all materials, just the wafer itself). |
silicon, silicon germanium, Pyrex (Corning 7740) |
| Wafer thickness List or range of wafer thicknesses the tool can accept |
100 .. 1000 µm |