Applied Materials Precision 5000 (chamber D)
List or range of wafer diameters the tool can accept
Device that holds the wafers during processing.
List of wafer materials this tool can accept (not list of all materials, just the wafer itself).
|silicon, quartz (single crystal), silicon on insulator, silicon germanium|
List or range of wafer thicknesses the tool can accept
|400 .. 750 µm|