SVG 8800 Photoresist coat and develop track

Model 8800
Type commercial
Equipment Characteristics
Wafer diameter(s)
List or range of wafer diameters the tool can accept
150 mm
Wafer geometry
Types of wafers this equipment can accept
1-flat, 2-flat
Wafer materials
List of wafer materials this tool can accept (not list of all materials, just the wafer itself).
Wafer thickness
List or range of wafer thicknesses the tool can accept
300 .. 800 µm