Wyko Optical Profiler
Range of wafer piece dimensions the equipment can accept
|0.1 .. 4 inch|
Geometry of wafer pieces the equipment can accept
|rectangular, circular, triangular shard, irregular|
Range of wafer piece thickness the equipment can accept
|200 .. 20000 m|
List or range of wafer diameters the tool can accept
|2.5 .. 100 mm|
Types of wafers this equipment can accept
|no-flat, 1-flat, 2-flat, notched|
Device that holds the wafers during processing.
List of wafer materials this tool can accept (not list of all materials, just the wafer itself).
|silicon, alumina, Borofloat (Schott), silicon on insulator, Pyrex (Corning 7740), quartz (single crystal), sapphire, stainless steel|
List or range of wafer thicknesses the tool can accept
|200 .. 2000 µm|