Tencor P-1 Contact Profiler
|Model||P-1 Long Scan profiler|
List or range of wafer diameters the tool can accept
|0 .. 150 mm|
Types of wafers this equipment can accept
|no-flat, 1-flat, 2-flat, notched|
Device that holds the wafers during processing.
List of wafer materials this tool can accept (not list of all materials, just the wafer itself).
|silicon, alumina, Borofloat (Schott), Pyrex (Corning 7740), quartz (single crystal), sapphire|
List or range of wafer thicknesses the tool can accept
|100 .. 1000 µm|