PlasmaTherm SL 700

Model
Type
Equipment Characteristics
Batch sizes 100 mm: 4
Wafer diameter(s)
List or range of wafer diameters the tool can accept
100 mm
Wafer materials
List of wafer materials this tool can accept (not list of all materials, just the wafer itself).
silicon
Wafer thickness
List or range of wafer thicknesses the tool can accept
100 .. 3000 µm