Tylan Furnace (Nitride, tube #10)
|Batch sizes||100 mm: 23|
List or range of wafer diameters the tool can accept
Types of wafers this equipment can accept
|1-flat, 2-flat, no-flat|
Device that holds the wafers during processing.
List of wafer materials this tool can accept (not list of all materials, just the wafer itself).
|quartz (fused silica), quartz (single crystal), silicon, silicon germanium, silicon on insulator|
List or range of wafer thicknesses the tool can accept
|300 .. 600 µm|