Headway Programmable Photoresist Spinner

Alternate Name Photoresist Spinner
Manufacturer Headway Research
Model PWM32
Type commercial
Equipment Characteristics
Piece dimension
Range of wafer piece dimensions the equipment can accept
1 .. 6 inch
Piece geometry
Geometry of wafer pieces the equipment can accept
circular, irregular, other, rectangular
Piece thickness
Range of wafer piece thickness the equipment can accept
200 .. 800 µm
Wafer materials
List of wafer materials this tool can accept (not list of all materials, just the wafer itself).
gallium arsenide, glass (category), other, silicon