Quintel UV Aligner
List or range of wafer diameters the tool can accept
|75 mm, 100 mm|
Types of wafers this equipment can accept
|1-flat, 2-flat, no-flat, notched|
Device that holds the wafers during processing.
List of wafer materials this tool can accept (not list of all materials, just the wafer itself).
|glass-ceramic, Pyrex (Corning 7740), quartz (fused silica), quartz (single crystal), sapphire, silicon, silicon on insulator|
List or range of wafer thicknesses the tool can accept
|300 .. 1500 µm|