SMSI 3800

Equipment Characteristics
Wafer diameter(s)
List or range of wafer diameters the tool can accept
100 .. 150 mm
Wafer holder
Device that holds the wafers during processing.
metal chuck
Wafer materials
List of wafer materials this tool can accept (not list of all materials, just the wafer itself).
silicon, gallium arsenide, germanium, gallium phosphide
Wafer thickness
List or range of wafer thicknesses the tool can accept
300 .. 13000 µm