Tystar Oxidation Furnace
Model Tytan 4-Stack Horizontal Furnace
Type commercial
Comments
  • For wafers thicker than 675 um contact for pricing and specs.
  • For oxide thickness runs greater than 2 um contact for pricing.
Equipment Characteristics
Batch sizes 100 mm: 25, 150 mm: 25
MOS clean no
Wafer diameter(s)
List or range of wafer diameters the tool can accept
 100 mm, 150 mm
Wafer geometry
Types of wafers this equipment can accept
 1-flat, 2-flat, no-flat
Wafer materials
List of wafer materials this tool can accept (not list of all materials, just the wafer itself).
 silicon, silicon on insulator
Wafer thickness
List or range of wafer thicknesses the tool can accept
 300 .. 675 µm