Olympus microscope |
|
|---|---|
| Model | |
| Type | commercial |
| Equipment Characteristics | |
| Wafer diameter(s) List or range of wafer diameters the tool can accept |
25 .. 100 mm |
| Wafer holder Device that holds the wafers during processing. |
recessed platen |
| Wafer materials List of wafer materials this tool can accept (not list of all materials, just the wafer itself). |
silicon, gallium arsenide, silicon on sapphire, sapphire, glass (category), quartz (single crystal) |
| Wafer thickness List or range of wafer thicknesses the tool can accept |
300 .. 10000 µm |