List or range of wafer diameters the tool can accept
|25 .. 100 mm|
Device that holds the wafers during processing.
List of wafer materials this tool can accept (not list of all materials, just the wafer itself).
|silicon, gallium arsenide, silicon on sapphire, sapphire, glass (category), quartz (single crystal)|
List or range of wafer thicknesses the tool can accept
|300 .. 10000 µm|