Technic Micro RIE 800
|Model||Micro RIE 800|
|Batch sizes||100 mm: 2, 150 mm: 1, 200 mm: 1, 75 mm: 4|
List or range of wafer diameters the tool can accept
|75 .. 200 mm|
Types of wafers this equipment can accept
Device that holds the wafers during processing.
List of wafer materials this tool can accept (not list of all materials, just the wafer itself).
|glass (category), silicon, silicon on insulator|
List or range of wafer thicknesses the tool can accept
|200 .. 1000 µm|