Parylene deposition system
|Batch sizes||100 mm: 4, 50 mm: 6, 75 mm: 5|
List or range of wafer diameters the tool can accept
|50 mm, 75 mm, 100 mm|
Types of wafers this equipment can accept
|no-flat, 1-flat, 2-flat, notched|
Device that holds the wafers during processing.
List of wafer materials this tool can accept (not list of all materials, just the wafer itself).
|silicon, alumina, glass (category), metal (category), silicon on insulator, Pyrex (Corning 7740), quartz (single crystal), sapphire|
List or range of wafer thicknesses the tool can accept
|100 .. 10000 µm|