Interserv IR maskmaker

Model
Type
Equipment Characteristics
File formats
List of CAD file formats supported (eg. GDSII, CIF)
gdsII
Mask coating
Mask coating material (eg. chrome).
chromium
Mask plate dimensions
Width, length, thickness of the mask plates (eg. 5x7x0.09 inch).
4x4x0.09 inch, 5x5x0.09 inch
Mask polarity
Polarity of the mask.
positive
Max aperture size
Size of pattern generator's maximum aperture (e.g., 1 mm)
20,000x20,000 um
Max field size 127 mm
Min aperture size
Size of pattern generator's minimum aperture (e.g., 2 um)
1x1 um