List or range of wafer diameters the tool can accept
|50 mm, 75 mm, 100 mm, 125 mm, 150 mm|
Types of wafers this equipment can accept
Device that holds the wafers during processing.
|aluminum ring, aluminum plate|
List of wafer materials this tool can accept (not list of all materials, just the wafer itself).
|Pyrex (Corning 7740), quartz (single crystal), glass (category), silicon|
List or range of wafer thicknesses the tool can accept
|200 .. 2000 µm|