Gaertner Ellipsometer

Model L116A
Type commercial
Equipment Characteristics
Wafer diameter(s)
List or range of wafer diameters the tool can accept
2.5 .. 100 mm
Wafer geometry
Types of wafers this equipment can accept
1-flat, 2-flat
Wafer holder
Device that holds the wafers during processing.
metal chuck
Wafer materials
List of wafer materials this tool can accept (not list of all materials, just the wafer itself).
silicon, silicon on insulator, Pyrex (Corning 7740), quartz (single crystal), sapphire
Wafer thickness
List or range of wafer thicknesses the tool can accept
300 .. 800 µm