Nanometrics NanoSpec 3000PHX
|Batch sizes||50 .. 150 mm: 1|
List or range of wafer diameters the tool can accept
|50 .. 150 mm|
Types of wafers this equipment can accept
|1-flat, 2-flat, no-flat, notched|
Device that holds the wafers during processing.
List of wafer materials this tool can accept (not list of all materials, just the wafer itself).