List or range of wafer diameters the tool can accept
|25 mm, 50 mm, 75 mm, 100 mm|
Device that holds the wafers during processing.
List of wafer materials this tool can accept (not list of all materials, just the wafer itself).
|silicon, glass (category)|
List or range of wafer thicknesses the tool can accept
|200 .. 800 µm|