Lindberg/Blue M mechanical oven

Equipment Characteristics
Batch sizes 25 .. 150 mm: 24
Wafer diameter(s)
List or range of wafer diameters the tool can accept
25 mm, 50 mm, 75 mm, 100 mm, 125 mm, 150 mm
Wafer holder
Device that holds the wafers during processing.
quartz boat
Wafer materials
List of wafer materials this tool can accept (not list of all materials, just the wafer itself).
silicon, glass (category)
Wafer thickness
List or range of wafer thicknesses the tool can accept
200 .. 800 µm