Alternate Name Anti-Stiction Coater
Manufacturer Applied MST
Model Freedom-1
Type commercial
  • The deposition apparatus is a prototype of a new commercial vapor phase deposition tool and can accommodate any sample/substrate size 200mm or smaller.
Equipment Characteristics
Batch sizes 100 mm: 1, 125 mm: 1, 150 mm: 1, 200 mm: 1, 50 mm: 5, 75 mm: 3
MOS clean no
Piece dimension
Range of wafer piece dimensions the equipment can accept
10 .. 200 mm
Piece geometry
Geometry of wafer pieces the equipment can accept
circular, irregular, other, rectangular, triangular shard
Piece thickness
Range of wafer piece thickness the equipment can accept
100 .. 10000 µm
Wafer diameter(s)
List or range of wafer diameters the tool can accept
50 mm, 75 mm, 100 mm, 125 mm, 150 mm, 200 mm
Wafer geometry
Types of wafers this equipment can accept
1-flat, 2-flat, no-flat, notched
Wafer holder
Device that holds the wafers during processing.
aluminum chuck, anodized aluminum, flat chuck, plate, teflon
Wafer materials
List of wafer materials this tool can accept (not list of all materials, just the wafer itself).
alumina, BK7, Borofloat (Schott), ceramic, Corning 1737, Foturan (Schott), fused silica, gallium arsenide, gallium phosphide, glass (Hoya), glass-ceramic, indium phosphide, lithium niobate, other, Pyrex (Corning 7740), quartz (fused silica), quartz (single crystal), sapphire, silicon, silicon carbide, silicon germanium, silicon on insulator, silicon on sapphire, titanium
Wafer thickness
List or range of wafer thicknesses the tool can accept
100 .. 10000 µm