Lindberg furnace

Alternate Name Lindberg
Manufacturer Lindberg
Type commercial
  • Gold contaminated.
    This is a non-MOS-clean furnace.
Equipment Characteristics
Batch sizes 100 mm: 12
MOS clean no
Wafer diameter(s)
List or range of wafer diameters the tool can accept
100 mm
Wafer geometry
Types of wafers this equipment can accept
1-flat, 2-flat, notched, no-flat
Wafer materials
List of wafer materials this tool can accept (not list of all materials, just the wafer itself).
Borofloat (Schott), Foturan (Schott), silicon, Pyrex (Corning 7740), silicon on insulator, quartz (fused silica), quartz (single crystal), PZT, glass (Hoya), Corning 1737
Wafer thickness
List or range of wafer thicknesses the tool can accept
100 .. 1000 µm