AT&T Double-sided prober
Alternate Name Two sided probe station
Manufacturer AT&T
Model AT10
Type commercial
Comments
  • Custom two probe system measuring resistance and capacitance to determine interconnect continuity and isolation respectively.
    Standard Resistance 0.1 - 10MEG ohms
    Standard Capacitance 0.1p - 1micro Farad
    High Resolution Resistance 0.02 - 30MEG ohms
    High Resolution Capcitance 0.02p - 10micro Farad
Equipment Characteristics
Batch sizes 100 mm: 1, 125 mm: 1, 150 mm: 1, 75 mm: 1
MOS clean no
Wafer diameter(s)
List or range of wafer diameters the tool can accept
 75 mm, 100 mm, 125 mm, 150 mm
Wafer geometry
Types of wafers this equipment can accept
 1-flat, 2-flat
Wafer holder
Device that holds the wafers during processing.
 vacuum chuck
Wafer materials
List of wafer materials this tool can accept (not list of all materials, just the wafer itself).
 alumina, BK7, Borofloat (Schott), ceramic, copper, Corning 1737, Foturan (Schott), fused silica, gallium arsenide, gallium phosphide, germanium, glass (Hoya), glass-ceramic, indium phosphide, lithium niobate, other, polyethylene, Pyrex (Corning 7740), quartz (fused silica), quartz (single crystal), sapphire, silicon, silicon carbide, silicon germanium, silicon on insulator
Wafer thickness
List or range of wafer thicknesses the tool can accept
 200 .. 1000 µm