Tylan/Tystar Furnaces (Boron diffusion)
|Batch sizes||100 mm: 24, 150 mm: 12|
List or range of wafer diameters the tool can accept
|100 mm, 150 mm|
Types of wafers this equipment can accept
Device that holds the wafers during processing.
List of wafer materials this tool can accept (not list of all materials, just the wafer itself).
List or range of wafer thicknesses the tool can accept
|300 .. 600 µm|