PECVD tool #1 |
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|---|---|
| Model | |
| Type | commercial |
| Comments | |
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| Equipment Characteristics | |
| Batch sizes | 100 mm: 25, 150 mm: 25, 200 mm: 25 |
| MOS clean | no |
| Wafer diameter(s) List or range of wafer diameters the tool can accept |
100 .. 200 mm |
| Wafer geometry Types of wafers this equipment can accept |
1-flat, 2-flat, notched, no-flat |
| Wafer materials List of wafer materials this tool can accept (not list of all materials, just the wafer itself). |
quartz (fused silica), silicon, Pyrex (Corning 7740), quartz (single crystal), silicon on insulator |
| Wafer thickness List or range of wafer thicknesses the tool can accept |
200 .. 1000 µm |