ACS200 coater/developer

Model ACS200
Type commercial
  • Automated coater and developer. Also does vapor HMDS, and hotplate bakes.
Equipment Characteristics
Batch sizes 100 mm: 1, 150 mm: 1
MOS clean yes
Wafer diameter(s)
List or range of wafer diameters the tool can accept
100 mm, 150 mm
Wafer geometry
Types of wafers this equipment can accept
1-flat, 2-flat
Wafer materials
List of wafer materials this tool can accept (not list of all materials, just the wafer itself).
silicon on insulator, silicon
Wafer thickness
List or range of wafer thicknesses the tool can accept
200 .. 800 µm