FNB1 |
|
|---|---|
| Alternate Name | LPCVD |
| Manufacturer | Kokusai |
| Model | BDF-4 |
| Type | commercial |
| Equipment Characteristics | |
| Batch sizes | 150 mm: 25 |
| MOS clean | yes |
| Wafer diameter(s) List or range of wafer diameters the tool can accept |
150 mm |
| Wafer geometry Types of wafers this equipment can accept |
1-flat, 2-flat, notched, no-flat |
| Wafer materials List of wafer materials this tool can accept (not list of all materials, just the wafer itself). |
silicon on insulator, silicon |
| Wafer thickness List or range of wafer thicknesses the tool can accept |
300 .. 675 µm |