|Batch sizes||150 mm: 1|
List or range of wafer diameters the tool can accept
Types of wafers this equipment can accept
List of wafer materials this tool can accept (not list of all materials, just the wafer itself).
|fused silica, Corning Eagle 2000, silicon, Corning 1737, silicon on insulator|
List or range of wafer thicknesses the tool can accept
|300 .. 675 µm|